H20 GENERATE S.B. - Tube Furnace

TUBE FURNACE RANGE

Inside Chamber Size	dia60x300mm(diameter2.5" x 12")
Standard Working Temperature	1100^.C ( continuous )
Maximum Working Temperature	1200^.C ( < 3 hrs)
Temperature Control	30 steps programmable and PID automatic control
Heating Rate	0~10^.C/ min (suggestion: =< 10^.C)
Temperature Accuracy	+ 1^.C
Heating Element	Fe-Cr-Al resistance wire
Working Voltage	AC 220V Single Phase 60/50 Hz (or according to your requirement)
Max. Power	2 KW
Net Weight	70 Kg

Inside Chamber Size	dia60x300mm(diameter2.5" x 12")
Standard Working Temperature	1300^.C ( continuous )
Maximum Working Temperature	1400^.C ( < 3 hrs)
Temperature Control	30 steps programmable and PID automatic control
Heating Rate	0~10^.C / min (suggestion: =< 10^.C)
Temperature Accuracy	+ 1^.C
Heating Element	SiC heating elements
Working Voltage	AC 220V Single Phase 60/50 Hz (or according to your requirement)
Max. Power	5 KW
Net Weight	90 Kg

Inside Chamber Size	dia60x300mm(diameter2.5" x 12")
Standard Working Temperature	1600^.C ( continuous )
Maximum Working Temperature	1650^.C ( < 3 hrs)
Temperature Control	30 steps programmable and PID automatic control
Heating Rate	0~10^.C / min (suggestion: =< 10^.C)
Temperature Accuracy	+ 1^.C
Heating Element	MoSi2 heating elements
Working Voltage	AC 220V Single Phase 60/50 Hz (or according to your requirement)
Max. Power	5 KW
Net Weight	150 Kg

Multi Zone Tube Furnace

Chamber size: dia60x300mm (dia2.5"x12")

XD-MZT tube furnace is controlled by two precision 30 segments digital temperature controllers independently. .

One zone is heated by MoSi2 elements up to 1600^.C , and another zone is heated by SiC element up to 1300^.C.

Thus, the tube furnace can create various thermal gradient by adjust two zone temperature. It is excellent furnace to prepare functional materials under thermal gradient, and also can be used for epitaxial film growth by CVD or PVD with a vacuum system.